Chemnitz University of Technology: 68 Million Euros for a New Cleanroom for Sustainable Microelectronics

The German Federal State of Saxony is supporting structural change in southwestern Saxony with additional investments in the millions in science and research. One of the largest planned investments is the construction of a new cleanroom for research and technology development in the field of sustainable microelectronics and sensor technology at the Center for Micro- and Nanotechnologies (ZfM) at Chemnitz University of Technology. Unused EU funding will be used for the building, which will cost approximately 68 million euros. Subject to approval by the European Commission, this will enable the implementation of a project that strengthens Chemnitz University of Technology’s research infrastructure and creates new opportunities for collaboration with research institutions and companies. The Saxon State Ministry of Science, Culture, and Tourism announced this in a press release.

“We are absolutely thrilled that, even in these times of enormous budgetary strain and challenges, the construction of the new cleanroom for research and technology development in the field of sustainable microelectronics and sensor technology can be realized. This is an extremely significant investment in Chemnitz University of Technology, particularly in its core competencies of materials and intelligent systems, as well as in the entire region of southwestern Saxony,” says Prof. Dr. Gerd Strohmeier, President of Chemnitz University of Technology.

With the planned cleanroom, the ZfM will further expand its expertise in the fields of micro- and nanotechnologies. The focus will be on technologies for sustainable microelectronics and sensor technology. The new infrastructure will lay the groundwork for cutting-edge research and technology development while also intensifying collaboration with non-university research institutions and companies.

“The planned new cleanroom is a landmark development for the Center for Micro- and Nanotechnologies at Chemnitz University of Technology. Thanks to these forward-looking investments, we can further expand and strengthen our world-class research. The state-of-the-art infrastructure is a tremendous source of motivation for our staff and also acts as a magnet for top-tier international scientists. In doing so, we are not only creating optimal conditions for research into sustainable microelectronics, cutting-edge technologies in the fields of quantum computing, neuromorphics, photonics, and intelligent sensor technology, but we are also building an even stronger bridge between excellent research and industrial application. “As a key player in the region, we are making a significant contribution to value creation—from which regional partners benefit in the long term,” said Prof. Dr. Harald Kuhn, holder of the Chair of Smart Systems Integration at the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology (TU Chemnitz), head of the Fraunhofer Institute for Electronic Nanosystems (ENAS), and director of the Center for Microelectronics (ZfM) at TU Chemnitz.

The planned investment is part of a comprehensive package of measures by the Free State of Saxony to strengthen Southwest Saxony as a center for science and research. This includes 79 European research funding projects (EFRE/JTF) in the field of mechanical and plant engineering with a total budget of more than 80 million euros, as well as projects totaling over 200 million euros in the medium-term financial plan through 2031.

• Background: The Center for Micro- and Nanotechnologies (ZfM)

With the ZfM, Chemnitz University of Technology (TU Chemnitz) boasts one of the world’s leading research centers for microsystems engineering and nanotechnologies. It is one of the technological cornerstones of the industrial region of Southwest Saxony and an indispensable pillar of “Silicon Saxony.” Key research areas include the miniaturization of systems, energy efficiency, performance enhancement with reduced resource consumption, and the integration of micro- and nanoscale components into complex systems.

Microelectronics is the core technology for AI, medical technology, autonomous systems, and energy and mobility solutions—and thus the foundation of industrial transformation. With over 120 German and 49 European partners, the ZfM acts as a global development partner for industry. The planned new building is therefore more than just a construction project; it is also of considerable strategic importance. It will secure and expand over 300 highly skilled jobs in Saxony.